JPH0539871Y2 - - Google Patents

Info

Publication number
JPH0539871Y2
JPH0539871Y2 JP9847089U JP9847089U JPH0539871Y2 JP H0539871 Y2 JPH0539871 Y2 JP H0539871Y2 JP 9847089 U JP9847089 U JP 9847089U JP 9847089 U JP9847089 U JP 9847089U JP H0539871 Y2 JPH0539871 Y2 JP H0539871Y2
Authority
JP
Japan
Prior art keywords
heating
plate
substrate
plates
surface area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9847089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0339532U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9847089U priority Critical patent/JPH0539871Y2/ja
Publication of JPH0339532U publication Critical patent/JPH0339532U/ja
Application granted granted Critical
Publication of JPH0539871Y2 publication Critical patent/JPH0539871Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lining Or Joining Of Plastics Or The Like (AREA)
JP9847089U 1989-08-25 1989-08-25 Expired - Lifetime JPH0539871Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9847089U JPH0539871Y2 (en]) 1989-08-25 1989-08-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9847089U JPH0539871Y2 (en]) 1989-08-25 1989-08-25

Publications (2)

Publication Number Publication Date
JPH0339532U JPH0339532U (en]) 1991-04-16
JPH0539871Y2 true JPH0539871Y2 (en]) 1993-10-08

Family

ID=31647568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9847089U Expired - Lifetime JPH0539871Y2 (en]) 1989-08-25 1989-08-25

Country Status (1)

Country Link
JP (1) JPH0539871Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11283909A (ja) * 1998-03-31 1999-10-15 Dainippon Screen Mfg Co Ltd 基板熱処理装置

Also Published As

Publication number Publication date
JPH0339532U (en]) 1991-04-16

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